FEI Titan3 FEG S/TEM
The Titan is a state-of-the-art 300kV high-resolution scanning transmission microscope. It has a high brightness field emission electron gun (FEG) for high coherence and small probes (<1Å) plus a monochromator to reduce the energy spread of the electron beam. The probe forming system has an aberration corrector to allow beam diameters down to 0.07nm, small enough to image individual atom columns. The microscope is equipped with an EDS X-ray detector for elemental analysis and a high-resolution EELS spectrometer for precision energy-loss analysis. Combining these detectors with the small probe allows atomic scale elemental analysis. Remote instrument access and control permits the equipment to benefit users outside of the OSU community.